Abstract: Testing and diagnosis of TSVs crosstalk faults has an important impact on improving the yield of integrated circuits. In order to reduce TSVs testing and diagnostic time, and reduce the area overhead of the test circuit, a new scheme for group testing and diagnosis of TSVs crosstalk faults using a test architecture of the unilateral scan chain is proposed.The scheme firstly divides the TSVs into several groups according to the crosstalk influence distance between TSVs by the algorithm for finding the largest independent set in an adjacency matrix, so that the TSVs in each group do not have crosstalk faults and maximize TSVs in the same group.After grouping, the TSVs in the same group are tested and diagnosed in parallel using the proposed test architecture, and the faulty TSVs can be further diagnosed according to the test response of the TSVs. The experimental results show that the proposed test scheme effectively reduces the test and diagnosis time, and reduces the area overhead.