张颢译, 曾传滨, 李晓静, 闫薇薇, 倪涛, 高林春, 罗家俊, 赵发展, 韩郑生. 28nm超薄体FD-SOI高温输出电流特性研究[J]. 微电子学与计算机, 2021, 38(12): 75-79. DOI: 10.19304/J.ISSN1000-7180.2021.0288
引用本文: 张颢译, 曾传滨, 李晓静, 闫薇薇, 倪涛, 高林春, 罗家俊, 赵发展, 韩郑生. 28nm超薄体FD-SOI高温输出电流特性研究[J]. 微电子学与计算机, 2021, 38(12): 75-79. DOI: 10.19304/J.ISSN1000-7180.2021.0288
ZHANG Haoyi, ZENG Chuanbin, LI Xiaojing, YAN Weiwei, NI Tao, GAO Linchun, LUO Jiajun, ZHAO Fazhan, HAN Zhengsheng. Investigation on high-temperature performance of 28nm UTB FDSOI[J]. Microelectronics & Computer, 2021, 38(12): 75-79. DOI: 10.19304/J.ISSN1000-7180.2021.0288
Citation: ZHANG Haoyi, ZENG Chuanbin, LI Xiaojing, YAN Weiwei, NI Tao, GAO Linchun, LUO Jiajun, ZHAO Fazhan, HAN Zhengsheng. Investigation on high-temperature performance of 28nm UTB FDSOI[J]. Microelectronics & Computer, 2021, 38(12): 75-79. DOI: 10.19304/J.ISSN1000-7180.2021.0288

28nm超薄体FD-SOI高温输出电流特性研究

Investigation on high-temperature performance of 28nm UTB FDSOI

  • 摘要: 针对高温引起MOSFET(金属氧化物半导体场效应晶体管)器件饱和输出电流值发生退化的问题,开展了对SOI(绝缘体上硅)工艺器件的高温特性分析.结果表明FDSOI的饱和输出电流随温度变化值ΔI/I=1.9%,远小于PDSOI的ΔI/I=24.1%.其原因是超薄体FD(全耗尽)SOI的结构优势使其和PD(部分耗尽)SOI相比拥有更低的阈值电压温度漂移率和更小的载流子迁移率改变量.

     

    Abstract: For the degradation of saturated output current value of MOSFET (Metal Oxide Semiconductor Field Effect Transistor) devices caused by high temperature, the high temperature characteristics of SOI (Silicon-On-Insulator) process devices are analyzed. The results show that the saturated output current of FDSOI varies with temperature ΔI/I = 1.9%, much smaller than PDSOI's ΔI/I = 24.1%. The reason for this is that the structural advantage of the ultra-thin FD (Full Depletion) SOI results in lower threshold voltage temperature drift and smaller carrier mobility change compared with the PD (Partial Depletion) SOI.

     

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